一种耐温 900℃的聚合物衍生陶瓷 SiCN 薄膜温度传感器

崔 在甫(岭南师范学院机电工程学院,中国)
张 亦晗(岭南师范学院机电工程学院,中国)
陈 烁(岭南师范学院机电工程学院,中国)
陈 辉(岭南师范学院机电工程学院,中国)
谢 晴(岭南师范学院机电工程学院,中国)

DOI: http://dx.doi.org/10.12349/tie.v1i5.4875

Article ID: 4875

摘要


针对地热发电等超高温(>900 ℃)环境需求,本文开发了一种耐温900 ℃的聚合物衍生陶瓷(PDC-SiCN)薄膜温度传感器。该传感器采用三层结构设计,包括氧化铝衬底、直写3D打印制备的SiCN敏感层及改进型抗氧化保护层。通过氮气气氛热解敏感层前驱体形成陶瓷薄膜,并集成高温引线结构。实验表明,传感器在室温至900 ℃范围内呈现稳定的电阻-温度特性,经多次热循环(ΔT=900 ℃)后仍保持优异抗氧化性能,900℃时的测温误差为-7.2%。研究验证了直写3D打印结合保护层改性工艺对提升PDC-SiCN薄膜传感器高温稳定性的有效性,为开发适用于极端环境的高精度温度传感器件提供了新策略。

关键词


耐高温;聚合物衍生陶瓷;SiCN;薄膜;温度传感器

全文:

PDF

参考


Qingbo Wen, Zhaoju Yu, Ralf Riedel. The Fate and Role of in situ Formed Carbon in Polymer-Derived Ceramics[J]. Progress in Materials Science, 2019, 100623.

Xiaohui Zhao, Haitao Li, Yinzhi Chen, et al. Preparation and thermoelectric characteristics of ITO/Pt thin film thermocouples on Ni-based superalloy substrate[J]. Vacuum, 2017, 140(Supplement C): 116-120.

Baisheng Ma, Yejie Cao, Yan Gao, et al. Fabrication of a thin double-layer thermistor based on DVB-modified polymer-derived SiCN ceramics[J]. Journal of Alloys Wang, Compounds, 2018, 732: 491-497.

Yuxi Yu, Qifan Huang, Samuel Rhodes, et al. Si CNO–GO composites with the negative temperature coefficient of resistance for high‐temperature sensor applications[J]. Journal of the American Ceramic Society, 2017, 100(2): 592-601.

Yongdong Yu, Jinping Li, Jiahong Niu, et al. The stability and repeatability of high temperature electrical properties of SiAlCN ceramic sensor heads[J]. Ceramics International, 2019, 45(6): 7588-7593.

Lida Xu, Lanlan Li, Lantian Tang, et al. Rapid Printing of High-Temperature Polymer-Derived Ceramic Composite Thin-Film Thermistor with Laser Pyrolysis[J]. ACS Applied Materials & Interfaces, 2023, 15(7): 9996-10005.

Xiong Zhou, Lida Xu, Lantian Tang,et al. Piezoelectric-pneumatic material jetting printing for non-contact conformal fabrication of high-temperature thick-film sensors[J]. Additive Manufacturing, 2024, 83: 104058.

Ni Li, Yejie Cao, Ran Zhao, et al. Polymer-derived SiAlOC ceramic pressure sensor with potential for high-temperature application[J]. Sensors & Actuators A Physical, 2017, 263.

Gustave C Fralick, John D Wrbanek. Thin Film Ceramic Strain Sensor Development for Harsh Environments[R]. Cleveland : NASA Glenn Research Center, 2007.

John D. Wrbanek, Gustave C. Fralick, José M. Gonzalez, et al. Thin Film Ceramic Strain Sensor Development for High Temperature Environments[C]. Aging Aircraft 2008, 2008 : 1-14.

Zaifu Cui, Xin Li, Xiaochuan Pan, et al. Polymer-derived ceramic thin-film temperature sensor[J]. Sensors and Actuators A: Physical, 2021, 332: 1-7.

Zaifu Cui, Guochun Chen, Xin Li, et al. An anti-oxidative coating made from particle-filled SiCN precursor for applications up to 800℃[J]. Journal of Alloys and Compounds, 2022, 913: 1-7.

Zaifu Cui, Xiaojun Chen, et al. Thin-film temperature sensor made from polymer-derived ceramics based on laser pyrolysis[J]. Sensors and Actuators A: Physical, 2022, 350: 114144.

Chao Wu, Xiaochuan Pan, Fan Lin, et al. TiB2/SiCN Thin-film Strain Gauges Fabricated By Direct Writing for High-temperature Application[J]. IEEE Sensors Journal, 2022, : 1-10.

Chao Wu, Fan Lin, Xiaochuan Pan, et al. TiB2‐modified polymer‐derived ceramic SiCN double‐layer thin films fabricated by direct writing for high‐temperature application[J]. Advanced Engineering Materials, 2022, : 1-8.

Zaifu Cui, Xin Li, Guochun Chen, et al. Thin-film temperature sensor made from particle-filled polymer-derived ceramics pyrolyzed in vacuum[J]. Journal of the European Ceramic Society, 2022, 42(6): 2735-2742.

Kanwar Pal Singh Rana, Vineet Kumar, Amit Kumar Dagar, et al. FPGA Implementation of Steinhart-Hart Equation for Accurate Thermistor Linearization[J], IEEE Sensors Journal 2018, : 1-1.

Alina Kulpa, Tom Troczynski. Oxidation of TiB2 powders below 900 C[J]. Journal of the American Ceramic Society 1996, 79(2): 518-520.

Ta Parthasarathy, Ra Rapp, M Opeka, et al. A model for the oxidation of ZrB2, HfB2 and TiB2[J]. Acta Materialia 2007, 55(17): 5999-6010.

Zi-Bo Niu, Zhuan Li, Peng Xiao, et al. Influence of h-BN as additive on microstructure and oxidation mechanism of C/C-SiC composite[J]. Journal of the European Ceramic Society, 2019, 39(15): 4634-4644.


Refbacks

  • 当前没有refback。


版权所有(c)2025 崔 在甫, 张 亦晗, 陈 烁, 陈 辉, 谢 晴

Creative Commons License
此作品已接受知识共享署名-非商业性使用 4.0国际许可协议的许可。